| Code | Parallelism | XY-axis displacement | Micrometer graduation | Micrometer accuracy | Stage size |
|---|---|---|---|---|---|
| 6584-401 | 0.04mm | ±6.5mm | 0.01mm | 0.01mm | 40x40mm |
| 6584-601 | 0.06mm | ±6.5mm | 0.01mm | 0.01mm | 60x60mm |
| 6584-901 | 0.06mm | ±12.5mm | 0.01mm | 0.02mm | 90x90mm |
| 6584-1251 | 0.08mm | ±12.5mm | 0.01mm | 0.02mm | 125x125mm |
| 6584-402 | 0.04mm | ±6.5mm | 0.01mm | 0.01mm | 40x40mm |
| 6584-602 | 0.06mm | ±6.5mm | 0.01mm | 0.01mm | 60x60mm |
| 6584-902 | 0.06mm | ±12.5mm | 0.01mm | 0.02mm | 90x90mm |
| 6584-1252 | 0.08mm | ±12.5mm | 0.01mm | 0.02mm | 125x125mm |
| 6584-403 | 0.04mm | ±6.5mm | 0.01mm | 0.01mm | 40x40mm |
| 6584-603 | 0.06mm | ±6.5mm | 0.01mm | 0.01mm | 60x60mm |
| 6584-903 | 0.06mm | ±12.5mm | 0.01mm | 0.02mm | 90x90mm |
| 6584-1253 | 0.08mm | ±12.5mm | 0.01mm | 0.02mm | 125x125mm |




