| Code | Range | Accuracy | Resolution | Repeatability | Magnification | Max. load |
|---|---|---|---|---|---|---|
| ISD-U322 | 300×200×200mm | vision:≤(2+L/200)μm, probe:≤(3+L/200)μm | 0.5μm | 1.5μm | 36X~210X (on 21.5'' monitor) | 20kg |
| ISD-U432 | 400×300×200mm | vision:≤(2+L/200)μm, probe:≤(3+L/200)μm | 0.5μm | 1.5μm | 36X~210X (on 21.5'' monitor) | 30kg |
| ISD-U532 | 500×300×200mm | vision:≤(2+L/200)μm, probe:≤(3+L/200)μm | 0.5μm | 1.5μm | 36X~210X (on 21.5'' monitor) | 35kg |
| ISD-U542 | 500×400×200mm | vision:≤(2+L/200)μm, probe:≤(3+L/200)μm | 0.5μm | 1.5μm | 36X~210X (on 21.5'' monitor) | 35kg |




