| Code | Accuracy | Resolution | X/Y axis travel | Z axis travel |
|---|---|---|---|---|
| ISD-VMM205 | ≤(3.5+L/100)μm | 0.5μm | 150×100mm | 150mm |
| ISD-VMM215 | ≤(3.5+L/100)μm | 0.5μm | 200×100mm | 150mm |
| ISD-VMM225 | ≤(3.5+L/100)μm | 0.5μm | 250×150mm | 200mm |
| ISD-VMM235 | ≤(3.5+L/100)μm | 0.5μm | 300×200mm | 200mm |
| ISD-VMM205D | ≤(3.5+L/100)μm | 0.5μm | 150×100mm | 150mm |
| ISD-VMM215D | ≤(3.5+L/100)μm | 0.5μm | 200×100mm | 150mm |
| ISD-VMM225D | ≤(3.5+L/100)μm | 0.5μm | 250×150mm | 200mm |
| ISD-VMM235D | ≤(3.5+L/100)μm | 0.5μm | 300×200mm | 200mm |




