| Code | Accuracy | Resolution | X/Y axis travel | Z axis travel |
|---|---|---|---|---|
| ISD-TM215 | ≤(2.5+L/50)μm | 0.1μm | 200×150mm | 210mm |
| ISD-TM320 | ≤(2.5+L/50)μm | 0.1μm | 300×200mm | 210mm |
| ISD-TM330 | ≤(2.5+L/50)μm | 0.1μm | 300×300mm | 210mm |
| ISD-TM430 | ≤(2.5+L/50)μm | 0.1μm | 400×300mm | 210mm |
| Code | Accuracy | Resolution | X/Y axis travel | Z axis travel |
|---|---|---|---|---|
| ISD-TM215 | ≤(2.5+L/50)μm | 0.1μm | 200×150mm | 210mm |
| ISD-TM320 | ≤(2.5+L/50)μm | 0.1μm | 300×200mm | 210mm |
| ISD-TM330 | ≤(2.5+L/50)μm | 0.1μm | 300×300mm | 210mm |
| ISD-TM430 | ≤(2.5+L/50)μm | 0.1μm | 400×300mm | 210mm |