| Code | Accuracy | Magnetic force | Roundness |
|---|---|---|---|
| ISQ-16-025CE-M6 | +1.25µm/-1µm | —— | 0.13µm |
| ISQ-16-025CE-M8 | +1.25µm/-1µm | —— | 0.13µm |
| ISQ-16-025CE-M10 | +1.25µm/-1µm | —— | 0.13µm |
| ISQ-16-025CE-M12 | +1.25µm/-1µm | —— | 0.13µm |
| ISQ-16-BASE-M6 | +1.25µm/-1µm | 80kgf | 0.13µm |
| ISQ-16-BASE-M8 | +1.25µm/-1µm | 80kgf | 0.13µm |
| ISQ-16-BASE-M10 | +1.25µm/-1µm | 80kgf | 0.13µm |
| ISQ-16-BASE-M12 | +1.25µm/-1µm | 80kgf | 0.13µm |




