| Code | Range | Accuracy | Resolution | Data transmission |
|---|---|---|---|---|
| 9501-1200 | 0~1250μm | ±(3%L+1)μm (range≤1250μm), ±(3%L+10)μm (range>1250μm) | 0.1μm (range<100μm), 1μm (range≥100μm) | Type-C |
| 9501-1200N | 0~1250μm | ±(3%L+1)μm (range≤1250μm), ±(3%L+10)μm (range>1250μm) | 0.1μm (range<100μm), 1μm (range≥100μm) | Type-C |




