| Code | Range | Accuracy | Resolution | Data transmission |
|---|---|---|---|---|
| 5405-QM21 | 0~2000μm | ±(2%L+1µm): ≤2000µm, ±(3%L+2µm): 2000µm~3000μm, ±(5%L+2µm): ≥3000μm | 0.1μm (<100μm), 1μm (≥100μm) | no |
| 5405-QM22 | 0~3000μm | ±(2%L+1µm): ≤2000µm, ±(3%L+2µm): 2000µm~3000μm, ±(5%L+2µm): ≥3000μm | 0.1μm (<100μm), 1μm (≥100μm) | no |
| 5405-QM23 | FE mode: 0~5000μm, NFE mode : 0~3000μm | ±(2%L+1µm): ≤2000µm, ±(3%L+2µm): 2000µm~3000μm, ±(5%L+2µm): ≥3000μm | 0.1μm (<100μm), 1μm (≥100μm) | no |




