320μm (-160μm~160μm) 1500µm Ra, Rq: 0.05~15µm; Rz, Rt: 0.1~50µm X axis 120mm/Z axis ±420μm X axis 17.5mm/Z axis 400µm (-200µm~200µm) X axis 17.5mm/Z axis 800µm (-400µm~400µm)

0.75mN 4mN

5μm/90° 2µm/90° 2µm/60° 10µm/90°

USB and bluetooth USB and Wireless