White Light Interference Measuring Microscope

Using white light source to combines non-coherent light interference with high-resolution microscopic imaging to generate microscopic three-dimensional profiles, by employing objectives with different magnification levels, the vertical measuring resolution can achieve the sub-nanometer range

3D surface micro-measurement and roughness evaluation are widely applied in precision machining, semiconductor processing, and materials analysis

Suitable for precision optical components, micro-nano machined devices, metal machined parts, wafers, and other components

Sub-nanometer vertical resolution, suitable for smooth surface measurement and analysis

Including nanoscale micro-profile analysis, 2D dimensional measurement, and roughness measurement, etc.

Using high-sensitivity, high-speed sensors and large-range, high-precision, high-speed piezoelectric ceramic units to achieve high scanning efficiency

Supporting measurement in 2D and 3D modes

Automatic stitching for large field view and measurement after stitching

Measurements can be saved in reports and exported

Vibration isolation platform is standard to ensure stable operation